热电堆作为太赫兹探测器

2010 2nd IEEE International Workshop Thz Radiation: Basic Research and Applications Pub Date : 2010-11-04 DOI:10.1109/TERA.2010.5619943

B. Szentpáli, P. Basa, P. Furjes, G. Battistig, I. Bársony

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引用次数: 2

摘要

提出了一种新的MEMS热电堆结构，其中热电堆作为偶极子天线。感应电流加热热电偶的热点。热电输出电压与吸收的辐射功率成正比。灵敏度与极化的关系证明了该装置的天线特性。在不优化结构和测量条件的情况下，在0.1 THz下获得了5.58 V/W的响应率。

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Thermopile as THz detector

A novel MEMS thermopile structure is presented, in which the thermopairs act as dipole antennas. The induced current heats the hot point of the thermopairs. The thermoelectric output voltage is proportional to the absorbed radiation power. The antenna-like feature of the device is demonstrated by the dependence of the sensitivity on the polarization. 5.58 V/W responsivity was achieved at 0.1 THz without optimizing the structure and the measuring conditions.

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2010 2nd IEEE International Workshop Thz Radiation: Basic Research and Applications

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