通过埋地金属光栅的巨大光传输(演示记录)

C. Roberts, Runyu Liu, Xiang Zhao, Lan Yu, Xiuling Li, D. Wasserman, V. Podolskiy
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摘要

在特殊光传输(EOT)中,在选定的频率下,金属薄膜上穿孔的一系列[周期性]孔径显示出超过100%归一化到总孔径面积的透射率。EOT器件在混合电光接触/器件中作为光学滤波器和耦合器具有潜在的应用前景。传统的无源超常光传输结构通常表现出远低于50%的非归一化传输,并且通常被更简单的薄膜技术所超越。为了克服这些限制,我们展示了一种新型的非凡光传输设备,通过金属辅助化学蚀刻工艺将一个非凡的光传输光栅“埋”在介电矩阵中。所得到的结构是一个特殊的光学传输光栅在电介质衬底上,电介质纳米柱通过光栅孔挤出。当归一化到金属薄膜的开放区域时,这些结构不仅显示出明显增强的峰值透射率,更重要的是,峰值透射率比从裸露的半导体表面观察到的要大。采用三维严格耦合波分析方法对结构进行了建模,并利用傅里叶变换红外反射光谱和透射光谱对结构进行了实验表征,结果表明两者吻合良好。在我们的结构中,光传输的急剧增强源于高折射率介质衬底的结构,柱有效地引导光通过金属孔。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Colossal optical transmission through buried metal gratings (Presentation Recording)
In Extraordinary Optical Transmission (EOT), a metallic film perforated with an array of [periodic] apertures exhibits transmission over 100% normalized to the total aperture area, at selected frequencies. EOT devices have potential applications as optical filters and as couplers in hybrid electro-optic contacts/devices. Traditional passive extraordinary optical transmission structures, typically demonstrate un-normalized transmission well below 50%, and are typically outperformed by simpler thin-film techniques. To overcome these limitations, we demonstrate a new breed of extraordinary optical transmission devices, by “burying” an extraordinary optical transmission grating in a dielectric matrix via a metal-assisted-chemical etching process. The resulting structure is an extraordinary optical transmission grating on top of a dielectric substrate with dielectric nano-pillars extruded through the grating apertures. These structures not only show significantly enhanced peak transmission when normalized to the open area of the metal film, but more importantly, peak transmission greater than that observed from the bare semiconductor surface. The structures were modeled using three-dimensional rigorous coupled wave analysis and characterized experimentally by Fourier transform infrared reflection and transmission spectroscopy, and the good agreement between the two has been demonstrated. The drastic enhancement of light transmission in our structures originates from structuring of high-index dielectric substrate, with pillars effectively guiding light through metal apertures.
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