等离子体双光栅结构增强MSM光电探测器结构的吸收

C. Tan, V. Lysak, N. Das, A. Karar, K. Alameh, Y. T. Lee
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引用次数: 13

摘要

本文采用时域有限差分模拟方法分析了双等离子体光栅结构对金属-半导体-金属光电探测器光吸收的增强效应。仿真结果表明,与仅使用亚波长孔径的MSM光电探测器结构相比,亚波长孔径和双纳米结构金属光栅的组合可使光吸收提高25倍。这种吸收增强的改善是由于底部光栅结构的耦合输出功能,该功能将光分配到亚波长孔径的两侧。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Absorption enhancement of MSM photodetector structure with a plasmonic double grating structure
We present finite difference time domain simulation to analyze the optical absorption enhancement of metal-semiconductor-metal photo detectors employing double plasmonic grating structures. Simulation results show that the combination of a subwavelength aperture and double nano-structured metal grating results in up to 25 times enhancement in optical absorption, in comparison to MSM photodetector structures employing only a subwavelength aperture. This improvement of the absorption enhancement is due to the coupling out function of the bottom grating structure which distributes the light to both side of the subwavelength aperture.
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