P. Chaisakul, Ziyi Zhang, Moloki Yako, D. Marris-Morini, L. Vivien, N. Kawai, K. Wada
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Development of silicon nitride arrayed waveguide grating by physical vapor deposition at room temperature
We designed and fabricated SiN4-based AWG using physical vapor deposition technique at room temperature, compatible with low thermal budget over a wide application range. Preliminary results indicate filtering performances capable of dense WDM on a chip.
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