inp基异质结双极晶体管取向效应的原子力显微镜分析

D. Sachelarie, S. Stanciu, G. Stanciu
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引用次数: 0

摘要

本文报道了原子力显微镜(AFM)对三发射极取向InP/InGaAs异质结双极晶体管电流增益的影响。用原子力显微镜对样品的三维表面形貌进行了表征。得到了三个发射极的电流增益与集电极电流的关系。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Atomic force microscopy analysis of orientation effect on InP-based heterojunction bipolar transistors
The influence of the mesa surface, imaged by atomic force microscopy (AFM), on the current gain of InP/InGaAs heterojunction bipolar transistor for three emitter crystallographic orientations was reported. The three-dimensional surface topography of the samples was characterized with an AFM. The current gain versus collector current for three emitters were obtained.
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