基于非谐振超声电机的超精密舞台控制系统的研制

IECON'03. 29th Annual Conference of the IEEE Industrial Electronics Society (IEEE Cat. No.03CH37468) Pub Date : 2003-12-01 DOI:10.1109/IECON.2003.1280249

S. Hashimoto, K. Ohishi, T. Ohishi, T. Ishikawa, K. Kosaka, Y. Egashira, H. Kubota, T. Ohmi

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引用次数: 13

摘要

本文介绍了一种采用非谐振超声电机的超精密舞台控制系统的研制。考虑到NRUSM的基本特性，进行了系统辨识实验。对影响定位精度的摩擦进行了分析。然后通过实验研究了摩擦力与控制带宽的关系。利用所识别的摩擦特性和模型，设计了带摩擦补偿的位置控制系统。在设计中，对其进行了基于抗卷风的宽带控制。通过仿真和实验验证了所识别模型和所设计控制系统的有效性。

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Development of an ultra-precision stage control system using nonresonant ultrasonic motor

This paper presents the development of an ultra-precision stage control system by introducing the nonresonant ultrasonic motor (NRUSM). System identification experiments are carried out considering the fundamental characteristic of NRUSM. The friction, which affects the accuracy of the positioning, is evaluated. Then the relation between the friction and the control bandwidth is experimentally examined. Using the frictional property as well as the identified model, the position control system with friction compensation is designed. Moreover, for its design the anti-windup-based wide band control is performed. Thus, the effectiveness of the identified model and the designed control system is verified by simulations and experiments.

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IECON'03. 29th Annual Conference of the IEEE Industrial Electronics Society (IEEE Cat. No.03CH37468)

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