SiO/sub //ZnO/金刚石结构的SAW谐振器

Proceedings of the 2000 IEEE/EIA International Frequency Control Symposium and Exhibition (Cat. No.00CH37052) Pub Date : 2000-06-07 DOI:10.1109/FREQ.2000.887373

H. Nakahata, A. Hachigo, K. Itakura, S. Fujii, S. Shikata

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引用次数: 15

摘要

研究了SiO/sub 2//in interdigital-transducer(IDT)/ZnO/diamond结构的表面声波(SAW)特性，发现该结构中的第2 Sezawa模式具有温度频率系数为零、速度高达10,000 m/s、机电耦合系数高达1.2%的优异声表面波特性。利用该结构成功制作了几种SAW谐振器，在中心频率为2.488、2.666和3.061 GHz时，插入损耗最小为6.7 ~ 13.4 dB, Q值为680 ~ 1600，具有优异的特性。它们在0 ~ 85/spl℃温度范围内的频移不大于50 ppm，小于st形切割石英或36y形切割石英的频移。这些特性优于曾经实现过的GHz SAW谐振器。

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SAW resonators of SiO/sub 2//ZnO/diamond structure in GHz range

Surface acoustic wave (SAW) characteristics of the SiO/sub 2//in interdigital-transducer(IDT)/ZnO/diamond structure were studied, and it was found that the 2nd Sezawa mode in this structure can provide superior SAW characteristics of a zero temperature coefficient of frequency (TCF), a high velocity of 10,000 m/s and a large electromechanical coupling coefficient of 1.2%. Several kinds of SAW resonators were successfully fabricated with this structure, which resulted in superior characteristics with the minimum insertion losses from 6.7 to 13.4 dB, Q values from 680 to 1600, at the center frequencies of 2.488, 2.666 and 3.061 GHz. Their frequency shifts in the temperature range from 0 to 85/spl deg/C were no more than 50 ppm which is smaller than those of ST-cut quartz or 36Y-cut quartz. These characteristics are superior to those ever realized for a GHz SAW resonator.

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Proceedings of the 2000 IEEE/EIA International Frequency Control Symposium and Exhibition (Cat. No.00CH37052)

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