压电作动器恶劣环境应用的抗扩散涂层

C. Behr, P. Wierach, M. Sinapius
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摘要

本文介绍了一种用于压电执行器的电绝缘防液涂层的研制过程。以某型自适应翼型在水洞中的流动研究为背景,采用含pzt陶瓷的自适应翼唇进行主动变形,必须对其进行绝缘密封,以防止水分的进入。由于多层致动器电极之间的电场强度高达2kv /mm,任何水分的进入都会导致介电强度的降低,并可能导致短路。为了防止自适应唇失效,执行器的电气连接必须用防水涂层绝缘。执行器在100hz频率下的使用寿命至少为107个负载循环。因此,涂层应尽可能具有延展性,否则涂层可能开裂,水可能扩散到执行器中。这就是为什么涂层的屈服强度必须比致动器的屈服强度高0.3%。为了研究其防水性能,在不同的工艺条件下,用不同的材料对几个样品进行了涂层处理。首先,执行器在环氧树脂中成型,然后应用抗扩散pvf箔。在对不同材料进行筛选后,通过PVD工艺将双组分焦油环氧树脂与金涂层结合的附加涂层似乎是最合适的工艺。另一种有前途的防水涂层是原子层沉积(ALD)。这是一种略有变化的化学气相沉积(CVD),参考Abdulagatov等人的研究,氧化铝(Al2O3)和二氧化钛(TiO2)的ALD可以减缓水中静态铜试样的腐蚀~ 80天[1]。通过在测试间歇进行再干燥,可以提高压电驱动器的水下使用寿命。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Diffusion-Resistant Coating for Harsh Environment Application of Piezoelectric Actuators
This paper presents the development process of an electrically insulating and liquid-impermeable coating for piezoelectric actuators. Against the background of flow investigations of an adaptive airfoil in a water tunnel the adaptive lip including PZT-ceramics for the active lip deformation must be insulated and sealed up against the ingress of moisture. Due to high electric field strength of 2 kV/mm between electrodes of multilayer actuators any ingress of moisture would lead to a reduction of the dielectric strength and may cause a short circuit. In order to prevent failure of the adaptive lip the electrical connections of the actuators have to be insulated by a waterproof coating. A service life of at least 107 load cycles at a frequency of 100 Hz is required for the actuators. Therefore the coating should be as ductile as possible otherwise it could crack and water could diffuse into the actuators. That is why the yield strength of the coating has to be higher than of the actuators, which is 0.3 %. For the investigation of the waterproofness several samples are coated with different materials in various processes. First the actuators are moulded in epoxy resin and then a diffusion-resistant PVF-foil is applied. After a screening of different materials, an additional coating with a two-component tar-epoxy resin in combination with a gold coating applied by a PVD process seems to be the most suitable process. Another promising waterproof coating is the atomic layer deposition (ALD). It is a slightly changed chemical vapor deposition (CVD) and referring to the studies of Abdulagatov et al. an ALD of aluminum oxide (Al2O3) and titanium dioxide (TiO2) can slow down the corrosion of static copper specimens in water for ∼80 days [1]. Through a redrying procedure during test intermissions an increased underwater service life of the piezoelectric actuators is achieved.
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