{"title":"在自热空心阴极放电中,通过反应蒸发钛和分解六甲基二氮杂烷获得了钛钛涂层的摩擦力学性能","authors":"A. Menshakov, Y. Bryukhanova","doi":"10.31554/978-5-7925-0655-8-2023-202-207","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":331057,"journal":{"name":"Plasma emission electronics: Proceedings of the VII International Kreindel Seminar","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"TRIBOMECHANICAL PROPERTIES OF TI SI N COATINGS OBTAINED BY REACTIVE EVAPORATION OF TITANIUM AND DECOMPOSITION OF HEXAMETHYLDISILAZANE IN A DISCHARGE WITH A SELF-HEATING HOLLOW CATHODE\",\"authors\":\"A. Menshakov, Y. Bryukhanova\",\"doi\":\"10.31554/978-5-7925-0655-8-2023-202-207\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":331057,\"journal\":{\"name\":\"Plasma emission electronics: Proceedings of the VII International Kreindel Seminar\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Plasma emission electronics: Proceedings of the VII International Kreindel Seminar\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.31554/978-5-7925-0655-8-2023-202-207\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Plasma emission electronics: Proceedings of the VII International Kreindel Seminar","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.31554/978-5-7925-0655-8-2023-202-207","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
TRIBOMECHANICAL PROPERTIES OF TI SI N COATINGS OBTAINED BY REACTIVE EVAPORATION OF TITANIUM AND DECOMPOSITION OF HEXAMETHYLDISILAZANE IN A DISCHARGE WITH A SELF-HEATING HOLLOW CATHODE