高指数对比绝缘体上硅纳米光子学

P. Bienstman, F. Van Laere, D. Taillaert, P. Dumon, W. Bogaerts, K. De Vos, D. van Thourhout, R. Baets
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引用次数: 3

摘要

我们将介绍几种基于绝缘体上硅纳米光子学的深紫外光刻技术的最新进展。我们将报告高效率光栅耦合器、超紧凑阵列波导光栅和基于环形谐振器的生物传感器
本文章由计算机程序翻译,如有差异,请以英文原文为准。
High Index-Contrast Silicon-On-Insulator Nanophotonics
We will present recent progress in several devices based on silicon-on-insulator nanophotonics using deep-UV lithography. We will report on high efficiency grating couplers, ultra-compact arrayed waveguide gratings and ring-resonator based biosensors
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