{"title":"基于ALD纳米图的亚波长光栅光学纳米毛的制备","authors":"I. Srimathi, W. Delaney, E. Johnson","doi":"10.1109/IPCON.2015.7323679","DOIUrl":null,"url":null,"abstract":"This paper introduces a novel concept for fabrication of subwavelength grating based beam shaping elements. The optical nano-hair structures are made from high-κ dielectrics using nano-patterning techniques and an atomic layer deposition tool.","PeriodicalId":375462,"journal":{"name":"2015 IEEE Photonics Conference (IPC)","volume":"142 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-11-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Fabrication of subwavelength grating based optical nano-hairs using ALD nano-patterning\",\"authors\":\"I. Srimathi, W. Delaney, E. Johnson\",\"doi\":\"10.1109/IPCON.2015.7323679\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper introduces a novel concept for fabrication of subwavelength grating based beam shaping elements. The optical nano-hair structures are made from high-κ dielectrics using nano-patterning techniques and an atomic layer deposition tool.\",\"PeriodicalId\":375462,\"journal\":{\"name\":\"2015 IEEE Photonics Conference (IPC)\",\"volume\":\"142 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-11-12\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 IEEE Photonics Conference (IPC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IPCON.2015.7323679\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 IEEE Photonics Conference (IPC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IPCON.2015.7323679","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fabrication of subwavelength grating based optical nano-hairs using ALD nano-patterning
This paper introduces a novel concept for fabrication of subwavelength grating based beam shaping elements. The optical nano-hair structures are made from high-κ dielectrics using nano-patterning techniques and an atomic layer deposition tool.
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