A Novel Modeling Method Based on 3D CT Images for Dynamics Analysis of The Micro-Hemispherical Resonator Gyroscope

A novel modeling method based on three-dimensional (3D) computerized tomography (CT) images was developed for the micro hemispherical resonator gyroscope design. Image reconstruction, processing and meshing by a Micro-CT was used for the finite element modeling (FEM), the accuracy of this non-destructive method is up to 0.5 μm. The modal characteristics of the micro shell resonator (MSR) were analyzed based on this modeling method. The obtained modal frequencies (f1, f2) and frequency split (delta f) of two degenerate wine-glass (WG) modes are consistent with the experimental results extracted by a custom-made quality factor tester. The error of estimated f and delta f was as low as 2.3% and 2.9%, respectively, indicating that the modeling method can be used for resonator dynamics characteristics evaluation and prediction.