System performance of PSI technique as a function of key parameters

Phase stepped interferometry (PSI) technique uses a charge coupled device (CCD) camera for intensity image acquisition and allow for near real-time full field object displacement measurements. Since this technique deals with nanometer level displacements, accuracy is a big factor for this method. System parameters of this technique control the accuracy of the measurement and hence determine the system's performance. In this paper an effort is made to explain the characteristics of the key parameters and their role in determining system's performance. The optimum value of the parameters have been chosen after a careful observation. A simulated result has also been presented using the valve of the parameters in order to show the importance of key parameters on system's performance.