全息纳米图案蓝宝石衬底上生长的氮化镓基发光器件萃取效率的提高

2005 Quantum Electronics and Laser Science Conference Pub Date : 2005-05-22 DOI:10.1109/QELS.2005.1549101

Dong-Ho Kim, Chi-o Cho, Jaehoon Kim, H. Jeon, T. Sakong, Jaehee Cho, Yongjo Park

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引用次数: 0

摘要

我们观察到在纳米图案蓝宝石衬底上生长的氮化镓基光发射器的光提取效率提高了两倍以上。利用激光全息技术生成纳米孔阵列，实现了大面积、高通量的加工。

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Extraction efficiency enhancement in GaN-based light emitters grown on a holographically nano-patterned sapphire substrate

We observed over two-fold enhancement in light extraction efficiency from GaN-based light emitters grown on a nano-patterned sapphire substrate. Nano-hole array patterns were generated by laser holography, which enabled a large area process with high throughput.

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2005 Quantum Electronics and Laser Science Conference

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