Design And Simulation Analysis Of A Single-ended Beam Thermopile Infrard Detector

Thermopile infrared detector is one of the earliest infrared detectors. In order to solve the problem of inefficient surface area and poor performance of traditional four-ended beam thermopile devices, a small and high-performance single-ended beam thermopile infrared detector was designed. Firstly, the working principle of the detector is introduced. Secondly, the structure of the detector is introduced. Silicon nitride is selected as the absorbing layer material, and P/N polycrystalline silicon is selected as the thermocouple material. And through theoretical calculation, compared with the four-end beam thermopower infrared detector, the detector has small size, high detection rate and high response rate. Finally, the correctness of the theory is verified by ANSYS software simulation, and the technological process of the detector is given.