不同材料电极MEM换能器的参数估计

2009 International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies Pub Date : 2009-11-13 DOI:10.1109/INTERNANO.2009.5335625

V. Dragunov, M. N. Lyutaeva

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引用次数: 8

摘要

本文给出了计算不同材料电极MEM换能器输出功率的数学表达式。分析了换能器输出功率与谐振频率的关系以及与电极材料功函数差的关系。

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Parameters estimation of the MEM transducer with electrodes produced from different materials

The paper contains mathematical expressions for computation of output power for MEM transducer with electrodes produced from different materials. Dependence of transducer output power on resonance frequency and its dependence on difference between work functions of electrode materials are analyzed.

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来源期刊

2009 International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies

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