基于MEMS的皮拉尼仪表的多尺度建模

2023 19th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD) Pub Date : 2023-07-03 DOI:10.1109/SMACD58065.2023.10192174

Prafullkrishna Dani, J. Franz, J. Knoch

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引用次数: 0

摘要

提出了一种基于MEMS的皮拉尼仪表功能仿真的多尺度建模方法。该方法准确地描述了在不同几何尺度下发生的物理效应，而不需要计算昂贵的模拟。在不使用任何修正因子的情况下，将模拟结果与实验测量结果进行了比较。

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Multiscale modelling of MEMS based Pirani gauges

A multiscale modelling approach is presented for the functional simulation of MEMS based Pirani gauges. The approach describes the physical effects occurring at different geometric scales accurately without the need for computationally expensive simulations. Simulation results are compared to experimental measurements of fabricated test structures without using any correction factors.

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来源期刊

2023 19th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD)

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