{"title":"基于MEMS的皮拉尼仪表的多尺度建模","authors":"Prafullkrishna Dani, J. Franz, J. Knoch","doi":"10.1109/SMACD58065.2023.10192174","DOIUrl":null,"url":null,"abstract":"A multiscale modelling approach is presented for the functional simulation of MEMS based Pirani gauges. The approach describes the physical effects occurring at different geometric scales accurately without the need for computationally expensive simulations. Simulation results are compared to experimental measurements of fabricated test structures without using any correction factors.","PeriodicalId":239306,"journal":{"name":"2023 19th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-07-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Multiscale modelling of MEMS based Pirani gauges\",\"authors\":\"Prafullkrishna Dani, J. Franz, J. Knoch\",\"doi\":\"10.1109/SMACD58065.2023.10192174\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A multiscale modelling approach is presented for the functional simulation of MEMS based Pirani gauges. The approach describes the physical effects occurring at different geometric scales accurately without the need for computationally expensive simulations. Simulation results are compared to experimental measurements of fabricated test structures without using any correction factors.\",\"PeriodicalId\":239306,\"journal\":{\"name\":\"2023 19th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD)\",\"volume\":\"30 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-07-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2023 19th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SMACD58065.2023.10192174\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2023 19th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMACD58065.2023.10192174","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A multiscale modelling approach is presented for the functional simulation of MEMS based Pirani gauges. The approach describes the physical effects occurring at different geometric scales accurately without the need for computationally expensive simulations. Simulation results are compared to experimental measurements of fabricated test structures without using any correction factors.