{"title":"一种自动对焦反射式无透镜数码全息显微镜","authors":"Zhuoshi Li, C. Zuo, Qian Chen","doi":"10.1117/12.2587376","DOIUrl":null,"url":null,"abstract":"This paper introduces an auto-focusing reflection-type lens-less digital holography microscopic system, which has the characteristics of wide field of view, high precision and miniaturization. It can quickly and accurately carry out three-dimensional (3D) reconstruction and quantitative measurement of small devices with reflective surfaces. The system uses 632.8nm laser illumination. After coherent imaging, the hologram is collected by a board-level camera, and digital holography technology is used for phase recovery and 3D reconstruction. At the same time, the compact design of the system and the use of the board-level camera have reduced the overall size to only: 68mmx43mmx38mm. Its auto-focusing function has better focus accuracy and recovery quality than traditional manual adjustment. In addition, we experimented with a miniaturized chip which is micrometers in size, reconstructed its 3D shape, and gave the effect of auto-focusing experiment.","PeriodicalId":370739,"journal":{"name":"International Conference on Photonics and Optical Engineering and the Annual West China Photonics Conference","volume":"22 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-01-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"An auto-focusing reflection-type lens-less digital holographic microscope\",\"authors\":\"Zhuoshi Li, C. Zuo, Qian Chen\",\"doi\":\"10.1117/12.2587376\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper introduces an auto-focusing reflection-type lens-less digital holography microscopic system, which has the characteristics of wide field of view, high precision and miniaturization. It can quickly and accurately carry out three-dimensional (3D) reconstruction and quantitative measurement of small devices with reflective surfaces. The system uses 632.8nm laser illumination. After coherent imaging, the hologram is collected by a board-level camera, and digital holography technology is used for phase recovery and 3D reconstruction. At the same time, the compact design of the system and the use of the board-level camera have reduced the overall size to only: 68mmx43mmx38mm. Its auto-focusing function has better focus accuracy and recovery quality than traditional manual adjustment. In addition, we experimented with a miniaturized chip which is micrometers in size, reconstructed its 3D shape, and gave the effect of auto-focusing experiment.\",\"PeriodicalId\":370739,\"journal\":{\"name\":\"International Conference on Photonics and Optical Engineering and the Annual West China Photonics Conference\",\"volume\":\"22 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-01-15\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Conference on Photonics and Optical Engineering and the Annual West China Photonics Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2587376\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Conference on Photonics and Optical Engineering and the Annual West China Photonics Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2587376","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
An auto-focusing reflection-type lens-less digital holographic microscope
This paper introduces an auto-focusing reflection-type lens-less digital holography microscopic system, which has the characteristics of wide field of view, high precision and miniaturization. It can quickly and accurately carry out three-dimensional (3D) reconstruction and quantitative measurement of small devices with reflective surfaces. The system uses 632.8nm laser illumination. After coherent imaging, the hologram is collected by a board-level camera, and digital holography technology is used for phase recovery and 3D reconstruction. At the same time, the compact design of the system and the use of the board-level camera have reduced the overall size to only: 68mmx43mmx38mm. Its auto-focusing function has better focus accuracy and recovery quality than traditional manual adjustment. In addition, we experimented with a miniaturized chip which is micrometers in size, reconstructed its 3D shape, and gave the effect of auto-focusing experiment.
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