提出了一种紫外光刻系统的概念，并对其后部进行了人工智能启动设计

2016 4th International Conference on Photonics, Optics and Laser Technology (PHOTOPTICS) Pub Date : 2016-12-05 DOI:10.5220/0005688500820086

I. Livshits, N. Zoric

{"title":"提出了一种紫外光刻系统的概念，并对其后部进行了人工智能启动设计","authors":"I. Livshits, N. Zoric","doi":"10.5220/0005688500820086","DOIUrl":null,"url":null,"abstract":"This paper describes a concept for designing a projection lens in lithographic optical system for 365 nm. Our approach for meeting this objective is to use the starting design obtained by artificial intelligence mode in Synopsys software. The proposed method describes the steps of getting a desired starting point of the optical system and the optimization problems in the optical system with a high numerical aperture.","PeriodicalId":222009,"journal":{"name":"2016 4th International Conference on Photonics, Optics and Laser Technology (PHOTOPTICS)","volume":"45 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-12-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"A concept of ultraviolet lithography system and design of its rear part using artificial intelligence for starting design\",\"authors\":\"I. Livshits, N. Zoric\",\"doi\":\"10.5220/0005688500820086\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper describes a concept for designing a projection lens in lithographic optical system for 365 nm. Our approach for meeting this objective is to use the starting design obtained by artificial intelligence mode in Synopsys software. The proposed method describes the steps of getting a desired starting point of the optical system and the optimization problems in the optical system with a high numerical aperture.\",\"PeriodicalId\":222009,\"journal\":{\"name\":\"2016 4th International Conference on Photonics, Optics and Laser Technology (PHOTOPTICS)\",\"volume\":\"45 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-12-05\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2016 4th International Conference on Photonics, Optics and Laser Technology (PHOTOPTICS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.5220/0005688500820086\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 4th International Conference on Photonics, Optics and Laser Technology (PHOTOPTICS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.5220/0005688500820086","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 4

摘要

本文介绍了一种用于365nm光刻光学系统的投影透镜的设计概念。我们实现这一目标的方法是使用Synopsys软件中人工智能模式获得的启动设计。该方法描述了获得光学系统理想起始点的步骤以及大数值孔径光学系统的优化问题。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

A concept of ultraviolet lithography system and design of its rear part using artificial intelligence for starting design

This paper describes a concept for designing a projection lens in lithographic optical system for 365 nm. Our approach for meeting this objective is to use the starting design obtained by artificial intelligence mode in Synopsys software. The proposed method describes the steps of getting a desired starting point of the optical system and the optimization problems in the optical system with a high numerical aperture.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2016 4th International Conference on Photonics, Optics and Laser Technology (PHOTOPTICS)

自引率

0.00%

发文量