利用电子束光刻和磁控溅射制备银表面增强拉曼散射衬底

2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013) Pub Date : 2013-08-01 DOI:10.1109/NANO.2013.6720912

Wenjun Zhang, Peng-Fei Nan, B. Lu, Yifang Chen, P. Vadgama, X. Qu

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引用次数: 1

摘要

采用电子束光刻技术和直流磁控溅射技术成功制备了可调谐银纳米柱阵列。所制备的衬底保持了优异的拉曼增强特性。该工艺为制备表面增强拉曼散射衬底提供了一种可重复、可靠的方法，尤其适用于高灵敏度的生物检测。

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Silver surface-enhanced raman scattering substrates prepared by a nanofabrication process using Electron Beam Lithography and magnetron sputtering

The tunable silver nano-pillar arrays were fabricated by using Electron Beam Lithography and direct current magnetron sputtering technique successfully. The as-prepared substrates retain an excellent Raman-enhancement characteristic. The developed process provides a reproducible and reliable method to fabricate the Surface-enhanced Raman Scattering substrate particularly for the high sensitivity biological detections.

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2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)

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