半导体TCO-SnO2:F薄膜的物理性质

H. Miranda, E. Ching-Prado
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引用次数: 1

摘要

采用喷雾热解技术在玻璃基板上制备了SnO2:F (FTO)半导体薄膜。在样品制备过程中,为了提高样品的光学和电学性能,采用了加入氟化铵(0.15 wt. NH4F)的二氯化锡SnCl2·2H2O溶液。薄膜在475℃的温度下沉积。半自动沉积设备可控制沉积过程。XRD分析表明,该薄膜为锡石型多晶结构。观察到微晶的表观尺寸为42.54±0.8 nm,残余微张力为0.10323±0.0028。形貌研究(SEM)显示了致密均匀的衬底涂层。可见光区的平均透过率为81.3%。德鲁德-洛伦兹模型表明,薄膜厚度为516 nm,带隙能为4.16 eV。最后,热表征表明ρ实际上没有变化,在0到130°C的温度范围内,ρ的恒定值为1.56 x 10-3 Ω-cm。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Physical Properties of Semiconductor TCO-SnO2:F Thin Film
A thin film of SnO2:F (FTO) semiconductor was deposited on a glass substrate using the spray pyrolysis technique. In the sample preparation, a solution of tin dichloride SnCl2·2H2O to which was added ammonium fluoride (0.15 wt. NH4F) was used in order to improve its optical and electrical properties. The films were deposited at a temperature of 475°C. A semiautomated deposition equipment allowed controlling the deposition process. The XRD study revealed that the film is polycrystalline in nature with a cassiterite type structure. The existence of microcrystals with an apparent size of 42.54 ± 0.8 nm and residual microtension in the percentage of 0.10323 ± 0.0028 was observed. The morphological study (SEM) revealed a compact and homogeneous substrate coating. The optical transmittance average in the visible region was 81.3%. The use of the Drude-Lorentz model showed that the film thickness and the optical band gap energy are 516 nm and 4.16 eV, respectively. Finally, the thermal characterization suggested that ρ practically does not change, showing a constant value of 1.56 x 10-3 Ω-cm in the temperature range of 0 to 130 ° C.
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