D. Lin, Robert MacDonald, J. Popp, Matthew Alberda, E. Andarawis, M. Aimi
{"title":"低成本导航级MEMS制造平台实现PNT创新","authors":"D. Lin, Robert MacDonald, J. Popp, Matthew Alberda, E. Andarawis, M. Aimi","doi":"10.1109/PLANS53410.2023.10140000","DOIUrl":null,"url":null,"abstract":"GE Research has developed a low-cost inertial MEMS process flow to support navigation-grade inertial sensor fabrication called ‘Polaris’ process. With a total of six mask layers, GE Polaris features thick silicon on insulator (SOl) with a 20 to 200 μm device layer, 30:1 high aspect ratio etching, and wafer level vacuum sealing at mTorr with through silicon via technology. The GE multiple-ring gyroscope (MRG) fabricated by the Polaris process has demonstrated navigation-grade performance with proven extreme-temperature reliability and successful integration to a MEMS IMU prototype. GE, through its GE Microfab is now offering Polaris as a foundry process, open to the PNT community.","PeriodicalId":344794,"journal":{"name":"2023 IEEE/ION Position, Location and Navigation Symposium (PLANS)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2023-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Low-Cost Navigation-grade MEMS Fabrication Platform to Enable PNT Innovations\",\"authors\":\"D. Lin, Robert MacDonald, J. Popp, Matthew Alberda, E. Andarawis, M. Aimi\",\"doi\":\"10.1109/PLANS53410.2023.10140000\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"GE Research has developed a low-cost inertial MEMS process flow to support navigation-grade inertial sensor fabrication called ‘Polaris’ process. With a total of six mask layers, GE Polaris features thick silicon on insulator (SOl) with a 20 to 200 μm device layer, 30:1 high aspect ratio etching, and wafer level vacuum sealing at mTorr with through silicon via technology. The GE multiple-ring gyroscope (MRG) fabricated by the Polaris process has demonstrated navigation-grade performance with proven extreme-temperature reliability and successful integration to a MEMS IMU prototype. GE, through its GE Microfab is now offering Polaris as a foundry process, open to the PNT community.\",\"PeriodicalId\":344794,\"journal\":{\"name\":\"2023 IEEE/ION Position, Location and Navigation Symposium (PLANS)\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-04-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2023 IEEE/ION Position, Location and Navigation Symposium (PLANS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/PLANS53410.2023.10140000\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2023 IEEE/ION Position, Location and Navigation Symposium (PLANS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PLANS53410.2023.10140000","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Low-Cost Navigation-grade MEMS Fabrication Platform to Enable PNT Innovations
GE Research has developed a low-cost inertial MEMS process flow to support navigation-grade inertial sensor fabrication called ‘Polaris’ process. With a total of six mask layers, GE Polaris features thick silicon on insulator (SOl) with a 20 to 200 μm device layer, 30:1 high aspect ratio etching, and wafer level vacuum sealing at mTorr with through silicon via technology. The GE multiple-ring gyroscope (MRG) fabricated by the Polaris process has demonstrated navigation-grade performance with proven extreme-temperature reliability and successful integration to a MEMS IMU prototype. GE, through its GE Microfab is now offering Polaris as a foundry process, open to the PNT community.