质子轰击硅的快速电子和热退火比较- x射线和红外光谱研究

{"title":"质子轰击硅的快速电子和热退火比较- x射线和红外光谱研究","authors":"K. Biskupska, J. Tatarkiewicz, K. Wieteska","doi":"10.1515/9783112493045-043","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":356212,"journal":{"name":"Septemmber 16","volume":"35 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1983-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Comparison of Fast Electron and Thermal Annealing of Proton Bombarded Silicon - X-Ray and IR Spectroscopy Study\",\"authors\":\"K. Biskupska, J. Tatarkiewicz, K. Wieteska\",\"doi\":\"10.1515/9783112493045-043\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":356212,\"journal\":{\"name\":\"Septemmber 16\",\"volume\":\"35 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1983-12-31\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Septemmber 16\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1515/9783112493045-043\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Septemmber 16","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1515/9783112493045-043","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}