{"title":"Mo-Si x射线多层反射镜的结构修饰:离子辅助溅射沉积","authors":"S. Vernon, D. Stearns, R. S. Rosen","doi":"10.1364/sxray.1992.tub3","DOIUrl":null,"url":null,"abstract":"The structural properties and soft x-ray normal incidence reflectivity of Mo-Si multilayers fabricated using ion-assisted dc magnetron sputter deposition are reported.","PeriodicalId":409291,"journal":{"name":"Soft-X-Ray Projection Lithography","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Structural Modification of Mo-Si X-Ray Multilayer Mirrors: Ion-Assisted Sputter Deposition\",\"authors\":\"S. Vernon, D. Stearns, R. S. Rosen\",\"doi\":\"10.1364/sxray.1992.tub3\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The structural properties and soft x-ray normal incidence reflectivity of Mo-Si multilayers fabricated using ion-assisted dc magnetron sputter deposition are reported.\",\"PeriodicalId\":409291,\"journal\":{\"name\":\"Soft-X-Ray Projection Lithography\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Soft-X-Ray Projection Lithography\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/sxray.1992.tub3\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Soft-X-Ray Projection Lithography","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/sxray.1992.tub3","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Structural Modification of Mo-Si X-Ray Multilayer Mirrors: Ion-Assisted Sputter Deposition
The structural properties and soft x-ray normal incidence reflectivity of Mo-Si multilayers fabricated using ion-assisted dc magnetron sputter deposition are reported.
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