在失效分析实验室实施热激光和光电激光刺激

Proceedings of the 10th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2003 Pub Date : 2003-07-07 DOI:10.1109/IPFA.2003.1222768

A. Firiti, D. Lewis, F. Beaudoin, P. Perdu, G. Haller, Y. Danto

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引用次数: 8

摘要

本文介绍了利用滨松公司的PHEMOS 1000升级版获得的光电激光刺激结果(OBIC或LIVA)。将该技术应用于ESD缺陷定位的案例研究中，并与热激光刺激技术进行了比较。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Implementing Thermal Laser and Photoelectric Laser Stimulation in a failure analysis laboratory

First Photoelectric Laser Stimulation results (OBIC or LIVA) obtained with an upgraded version of a PHEMOS 1000 from Hamamatsu are presented. This technique is applied in a case study concerning ESD defect localization and is compared to the Thermal Laser Stimulation one.

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Proceedings of the 10th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2003

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