成像椭偏仪探测器及数据采集系统

IMTC/98 Conference Proceedings. IEEE Instrumentation and Measurement Technology Conference. Where Instrumentation is Going (Cat. No.98CH36222) Pub Date : 1998-05-18 DOI:10.1109/IMTC.1998.679879

B. Karlsson

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引用次数: 1

摘要

本文介绍了一种用于椭偏成像的CCD探测器。在椭偏成像中，需要一种高分辨率的快速探测器。控制增益也很重要。目前市场上的系统满足速度和分辨率标准，但它们缺乏控制增益的可能性。本文所述的探测器和数据采集系统的最大采样速度约为20张/秒，分辨率为11-12位，增益可手动调节。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Detector and data acquisition system for an imaging ellipsometer

This paper describes a CCD detector to be used for imaging ellipsometry. For imaging ellipsometry a fast detector with a high resolution is wanted. It is also important to have control over the gain. The systems on the market today fulfill the speed and resolution criteria, but they lack the possibility to control the gain. The detector and data acquisition system described in this paper has a maximum sampling speed of approximately 20 pictures/second, a resolution of 11-12 bits and a manually adjustable gain.

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来源期刊

IMTC/98 Conference Proceedings. IEEE Instrumentation and Measurement Technology Conference. Where Instrumentation is Going (Cat. No.98CH36222)

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