F. Evans, J. Wall, B. Hancock, P. Brusius, M. Mitchell
{"title":"vhsic级1.25 μ m抗辐射CMOS IC器件的可靠性","authors":"F. Evans, J. Wall, B. Hancock, P. Brusius, M. Mitchell","doi":"10.1109/UGIM.1991.148132","DOIUrl":null,"url":null,"abstract":"An experiment was performed on 1.25 mu m radiation-hard, very high-speed integrated circuit (VHSIC)-level 2 K*8 static random access memory (SRAM) devices with the objective of investigating the relationship between the SRAM reliability and the die yield at wafer probe. The SRAMs were product-level devices that were included as part of a test chip, the yield/circuit/reliability analysis tool (YCRAT). There were 54 YCRAT sites on each four-inch wafer. After all wafer-level tests, 423 SRAMs were packaged in 24-pin flatpacks and subjected to a 1000 h, 125 degrees C life test. 183 of the parts were from wafers judged to be bad, i.e. for some reason the SRAM dice or test structures did not pass wafer-level screening, and 240 parts were from wafers judged to be good, i.e. they passed wafer-level screening. The results of the test showed that wafers exhibiting metal/dielectric problems had poor yields through screening and somewhat worse reliability.<<ETX>>","PeriodicalId":163406,"journal":{"name":"Proceedings Ninth Biennial University/Government/Industry Microelectronics Symposium","volume":"8 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1991-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Reliability in VHSIC-level 1.25 mu m radiation-hard CMOS IC devices\",\"authors\":\"F. Evans, J. Wall, B. Hancock, P. Brusius, M. Mitchell\",\"doi\":\"10.1109/UGIM.1991.148132\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"An experiment was performed on 1.25 mu m radiation-hard, very high-speed integrated circuit (VHSIC)-level 2 K*8 static random access memory (SRAM) devices with the objective of investigating the relationship between the SRAM reliability and the die yield at wafer probe. The SRAMs were product-level devices that were included as part of a test chip, the yield/circuit/reliability analysis tool (YCRAT). There were 54 YCRAT sites on each four-inch wafer. After all wafer-level tests, 423 SRAMs were packaged in 24-pin flatpacks and subjected to a 1000 h, 125 degrees C life test. 183 of the parts were from wafers judged to be bad, i.e. for some reason the SRAM dice or test structures did not pass wafer-level screening, and 240 parts were from wafers judged to be good, i.e. they passed wafer-level screening. The results of the test showed that wafers exhibiting metal/dielectric problems had poor yields through screening and somewhat worse reliability.<<ETX>>\",\"PeriodicalId\":163406,\"journal\":{\"name\":\"Proceedings Ninth Biennial University/Government/Industry Microelectronics Symposium\",\"volume\":\"8 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1991-06-12\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings Ninth Biennial University/Government/Industry Microelectronics Symposium\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/UGIM.1991.148132\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings Ninth Biennial University/Government/Industry Microelectronics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/UGIM.1991.148132","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Reliability in VHSIC-level 1.25 mu m radiation-hard CMOS IC devices
An experiment was performed on 1.25 mu m radiation-hard, very high-speed integrated circuit (VHSIC)-level 2 K*8 static random access memory (SRAM) devices with the objective of investigating the relationship between the SRAM reliability and the die yield at wafer probe. The SRAMs were product-level devices that were included as part of a test chip, the yield/circuit/reliability analysis tool (YCRAT). There were 54 YCRAT sites on each four-inch wafer. After all wafer-level tests, 423 SRAMs were packaged in 24-pin flatpacks and subjected to a 1000 h, 125 degrees C life test. 183 of the parts were from wafers judged to be bad, i.e. for some reason the SRAM dice or test structures did not pass wafer-level screening, and 240 parts were from wafers judged to be good, i.e. they passed wafer-level screening. The results of the test showed that wafers exhibiting metal/dielectric problems had poor yields through screening and somewhat worse reliability.<>