栅极周围(八角形截面)无结晶体管尺度长度的确定

K. Sarma, Santanu Sharma
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引用次数: 0

摘要

本文报道了一种确定栅极(八角形截面)无结晶体管标度长度的方法。通过求解三维泊松方程得到尺度长度表达式。给出了刻度长度随栅极氧化物厚度、八边形边长和介电常数的变化规律。给出了栅极氧化物厚度、八边形边长、沟道长度、漏极电压和栅极电压不同取值时的横向和中心静电电位分布图。并给出了不同漏极电压值下的纵向电场分布图。尺度长度值随栅极氧化物厚度和八边形边长的减小呈线性减小,随介电常数的增大呈非线性减小。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Scale length determination of Gate all around (Octagonal cross section) Junctionless Transistor
A method for scale length determination of Gate all around (Octagonal cross section) Junctionless Transistor is reported in this paper. The scale length expression is obtained by solving the 3D Poisson's equation. Variation of scale length with gate oxide thickness, side length of octagon and dielectric constant is shown. The Transverse and central electrostatic potential profile is also shown for different values of gate oxide thickness, side length of octagon, Channel length and Drain voltage and Gate Voltage are shown. Longitudinal electric field profile for different value of drain voltage is also shown. The scale length value decreases linearly with decreasing gate oxide thickness and side length of octagon and decreases nonlinearly with increasing dielectric constant.
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