{"title":"400kHz驱动铁磁电感耦合等离子体的数字匹配网络","authors":"S. Cho, J. Bang, Y.K. Lee, C. Chung","doi":"10.1109/PPPS.2007.4345867","DOIUrl":null,"url":null,"abstract":"Summary form only given. Low frequency (400 kHz) Ferrite ICP has been proposed for large area processing. Because the coupling coefficient is close to 1, the transformer matching can be adapted to Ferrite ICP. The transformer matching system is simple and cheap. In this paper the new matching system by controlling the turns of transformer using relays is proposed for impedance matching. We developed a simple matching system and characterized it when the turns were changed. It was observed that the 2-channel relay is available for transformer matching. Furthermore, the high speed digital auto-matching was possible by using microcontrollers.","PeriodicalId":446230,"journal":{"name":"2007 IEEE 34th International Conference on Plasma Science (ICOPS)","volume":"192 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-06-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"The Digital Matching Network for a ferromagnetic Inductively Coupled Plasma driven at 400kHz\",\"authors\":\"S. Cho, J. Bang, Y.K. Lee, C. Chung\",\"doi\":\"10.1109/PPPS.2007.4345867\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Summary form only given. Low frequency (400 kHz) Ferrite ICP has been proposed for large area processing. Because the coupling coefficient is close to 1, the transformer matching can be adapted to Ferrite ICP. The transformer matching system is simple and cheap. In this paper the new matching system by controlling the turns of transformer using relays is proposed for impedance matching. We developed a simple matching system and characterized it when the turns were changed. It was observed that the 2-channel relay is available for transformer matching. Furthermore, the high speed digital auto-matching was possible by using microcontrollers.\",\"PeriodicalId\":446230,\"journal\":{\"name\":\"2007 IEEE 34th International Conference on Plasma Science (ICOPS)\",\"volume\":\"192 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-06-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2007 IEEE 34th International Conference on Plasma Science (ICOPS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/PPPS.2007.4345867\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 IEEE 34th International Conference on Plasma Science (ICOPS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PPPS.2007.4345867","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The Digital Matching Network for a ferromagnetic Inductively Coupled Plasma driven at 400kHz
Summary form only given. Low frequency (400 kHz) Ferrite ICP has been proposed for large area processing. Because the coupling coefficient is close to 1, the transformer matching can be adapted to Ferrite ICP. The transformer matching system is simple and cheap. In this paper the new matching system by controlling the turns of transformer using relays is proposed for impedance matching. We developed a simple matching system and characterized it when the turns were changed. It was observed that the 2-channel relay is available for transformer matching. Furthermore, the high speed digital auto-matching was possible by using microcontrollers.
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