用于折射率传感的紧凑侧耦合氮化硅光子晶体纳米束腔

2023 IEEE Silicon Photonics Conference (SiPhotonics) Pub Date : 2023-04-01 DOI:10.1109/SiPhotonics55903.2023.10141917

J. H. Mendoza-Castro, A. Vorobev, S. Iadanza, T. Oliveira, B. Lendl, L. O’Faolain, M. Grande

{"title":"用于折射率传感的紧凑侧耦合氮化硅光子晶体纳米束腔","authors":"J. H. Mendoza-Castro, A. Vorobev, S. Iadanza, T. Oliveira, B. Lendl, L. O’Faolain, M. Grande","doi":"10.1109/SiPhotonics55903.2023.10141917","DOIUrl":null,"url":null,"abstract":"In this work, we present a compact high-Q factor S<inf>3</inf>N<inf>4</inf>-based Photonic Crystal Nanobeam Cavity (PhCNC) that achieves calculated Q-factors above 106(experimental 104) in case over a wide range of upper-cladding refractive index values (1 to 1.45), angle sidewalls (0°, 5° and 7°) and stick widths. In addition, a high sensitivity (~175nm/RIU) for liquids is demonstrated.","PeriodicalId":105710,"journal":{"name":"2023 IEEE Silicon Photonics Conference (SiPhotonics)","volume":"142 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Compact side-coupled Silicon Nitride Photonic Crystal Nanobeam Cavity for refractive index sensing\",\"authors\":\"J. H. Mendoza-Castro, A. Vorobev, S. Iadanza, T. Oliveira, B. Lendl, L. O’Faolain, M. Grande\",\"doi\":\"10.1109/SiPhotonics55903.2023.10141917\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this work, we present a compact high-Q factor S<inf>3</inf>N<inf>4</inf>-based Photonic Crystal Nanobeam Cavity (PhCNC) that achieves calculated Q-factors above 106(experimental 104) in case over a wide range of upper-cladding refractive index values (1 to 1.45), angle sidewalls (0°, 5° and 7°) and stick widths. In addition, a high sensitivity (~175nm/RIU) for liquids is demonstrated.\",\"PeriodicalId\":105710,\"journal\":{\"name\":\"2023 IEEE Silicon Photonics Conference (SiPhotonics)\",\"volume\":\"142 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2023 IEEE Silicon Photonics Conference (SiPhotonics)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SiPhotonics55903.2023.10141917\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2023 IEEE Silicon Photonics Conference (SiPhotonics)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SiPhotonics55903.2023.10141917","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

在这项工作中，我们提出了一个紧凑的基于s3n4的高q因子光子晶体纳米束腔(PhCNC)，在宽范围的上包层折射率值(1至1.45)，角侧壁(0°，5°和7°)和棒宽度下，计算q因子超过106(实验104)。此外，还证明了对液体的高灵敏度(~175nm/RIU)。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Compact side-coupled Silicon Nitride Photonic Crystal Nanobeam Cavity for refractive index sensing

In this work, we present a compact high-Q factor S3N4-based Photonic Crystal Nanobeam Cavity (PhCNC) that achieves calculated Q-factors above 10⁶(experimental 10⁴) in case over a wide range of upper-cladding refractive index values (1 to 1.45), angle sidewalls (0°, 5° and 7°) and stick widths. In addition, a high sensitivity (~175nm/RIU) for liquids is demonstrated.

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2023 IEEE Silicon Photonics Conference (SiPhotonics)

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