近红外InGaAs探测器的串扰研究

Xue Li, Hengjing Tang, Tao Li, Cui Fan, X. Shao, Jianwei Li, Jun Wei, H. Gong
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引用次数: 5

摘要

高密度FPA探测器的串扰特性在光电系统应用中受到广泛关注。研究了近红外(NIR) InGaAs光电二极管和焦平面阵列(fpa)的串扰特性。利用激光束感应电流技术(LBIC)测量了设计光敏区域外的吸收,结果表明,过量吸收增大了相邻像元的串扰。利用像素之间的有效吸收层进行结构优化,可以有效地将串扰降低到2.5%。优化后光电二极管的串扰成分主要来自载流子横向扩散产生的电子信号。对于平面型探测器,采用测试结构对不同结构的串扰进行了比较,保护环结构对串扰具有良好的抑制作用。设计了30μm背照32 × 32 InGaAs光电二极管,利用LBIC测量了其有效载流子的横向扩散和光敏区填充系数。结果表明,对扩散区域进行优化后,探测器的填充系数可达98%,且相邻像素之间存在最小响应。基于这些串扰测量结果和优化结构设计,设计了线性InGaAs光电二极管,并制作了InGaAs FPA组件。该组件具有较高的电光性能和较好的串扰改善性能。将该组件应用于红外成像系统,计算出FPA组件的调制传递函数(MTF)大于0.50。基于FPA装配得到了清晰的图像。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Crosstalk study of near infrared InGaAs detectors
Crosstalk characteristics of high density FPA detectors attract widespread attention in the application of electro-optical systems. Crosstalk characteristics of near-infrared (NIR) InGaAs photodiodes and focal plane arrays (FPAs) were studied in this paper. The mesa type detector was investigated by using laser beam induced current technique (LBIC) to measure the absorption outside the designed photosensitive area, and the results show that the excess absorption enlarges the crosstalk of the adjacent pixels. The structure optimization using the effective absorption layer between the pixels can effectively reduce the crosstalk to 2.5%. The major crosstalk components of the optimization photodiode come from the electronic signal caused by carrier lateral diffusion. For the planar type detectors, test structures were used to compare the crosstalk of different structures, and the guard ring structure shows good suppression of the crosstalk. Then the back-illuminated 32x32 InGaAs photodiodes with 30μm pitch were designed, and LBIC was used to measure its lateral diffusion of the effective carriers and fill factor of photosensitive area. The results indicate that the fill factor of detectors can reach up to 98% when the diffusion region is optimized, and the minimum response exists between two neighborhood pixels. Based on these crosstalk measurement results and optimizing structure designs, the linear InGaAs photodiodes were designed and thus the InGaAs FPA assembly was fabricated. The assembly shows higher electro-optical performance and good improvement on crosstalk. The assembly was applied in infrared imaging system and modulation transfer function (MTF) of FPA assembly was calculated to be above 0.50. The clear image based on FPA assembly was obtained.
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