{"title":"在真空蒸发器中制备Peltier元素的Bi2Te3和sb2te3沉积比的控制","authors":"L. Gonçalves, J. G. Rocha, J. Correia, C. Couto","doi":"10.1109/ISIE.2006.296053","DOIUrl":null,"url":null,"abstract":"This article reports the main problem and the corresponding solution of the co-evaporation of Bi2Te3 and Sb 2Te3 films for the fabrication of Peltier elements. This main problem consists in the control of the deposition rates of the two elements: Bi or Sb and Te, which have very different vapor pressures. The control of the deposition ratio was achieved by means of a PID controller, which permitted the fabrication of thin-film Peltier elements that produce a temperature gradient in the order of 2degC between their hot and cold junctions, when measured at free air conditions","PeriodicalId":296467,"journal":{"name":"2006 IEEE International Symposium on Industrial Electronics","volume":"27 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"Control of the Deposition Ratio of Bi2Te3 and Sb2 Te3 in a Vacuum Evaporator for fabrication of Peltier Elements\",\"authors\":\"L. Gonçalves, J. G. Rocha, J. Correia, C. Couto\",\"doi\":\"10.1109/ISIE.2006.296053\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This article reports the main problem and the corresponding solution of the co-evaporation of Bi2Te3 and Sb 2Te3 films for the fabrication of Peltier elements. This main problem consists in the control of the deposition rates of the two elements: Bi or Sb and Te, which have very different vapor pressures. The control of the deposition ratio was achieved by means of a PID controller, which permitted the fabrication of thin-film Peltier elements that produce a temperature gradient in the order of 2degC between their hot and cold junctions, when measured at free air conditions\",\"PeriodicalId\":296467,\"journal\":{\"name\":\"2006 IEEE International Symposium on Industrial Electronics\",\"volume\":\"27 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-07-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2006 IEEE International Symposium on Industrial Electronics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISIE.2006.296053\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 IEEE International Symposium on Industrial Electronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISIE.2006.296053","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Control of the Deposition Ratio of Bi2Te3 and Sb2 Te3 in a Vacuum Evaporator for fabrication of Peltier Elements
This article reports the main problem and the corresponding solution of the co-evaporation of Bi2Te3 and Sb 2Te3 films for the fabrication of Peltier elements. This main problem consists in the control of the deposition rates of the two elements: Bi or Sb and Te, which have very different vapor pressures. The control of the deposition ratio was achieved by means of a PID controller, which permitted the fabrication of thin-film Peltier elements that produce a temperature gradient in the order of 2degC between their hot and cold junctions, when measured at free air conditions
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