面内旋转33/声压角/ y形石英表面声波谐振器的温度稳定性

2002 IEEE Ultrasonics Symposium, 2002. Proceedings. Pub Date : 2002-10-08 DOI:10.1109/ULTSYM.2002.1193362

S. Kanna, K. Iizawa, T. Yamazaki, M. Takagi

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引用次数: 7

摘要

我们在平面内旋转33/spl度/ y形切割石英上提出了表面声波谐振器，提高了温度稳定性。在欧拉角(0,123,39-44)条件下，用有限元法计算了瑞利波的频率温度特性。通过实验验证了计算温度系数的准确性。我们还测量了原型SAW谐振器的谐振特性。

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Temperature stability of surface acoustic wave resonators on the in-plane rotated 33/spl deg/Y-cut quartz

We present surface acoustic wave resonators on the in-plane rotated 33/spl deg/Y-cut quartz with improved temperature stability. We calculate the frequency temperature characteristics of Rayleigh waves using finite element method under the condition of Euler angle (0, 123, 39-44). We confirmed the accuracy of calculated temperature coefficients by experiments. We also measured the resonance characteristics of prototype SAW resonators.

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2002 IEEE Ultrasonics Symposium, 2002. Proceedings.

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