铜上两层不同阶数薄膜的热测量

K. Dinash, D. Mutharasu, Y. Lee
{"title":"铜上两层不同阶数薄膜的热测量","authors":"K. Dinash, D. Mutharasu, Y. Lee","doi":"10.1109/ISIEA.2011.6108786","DOIUrl":null,"url":null,"abstract":"Thermal interface resistance of solids is an important factor for heat conduction from one solid to another. Interface resistance disrupts heat flow in systems like CPUs and various solid state devices like LEDs. Interface materials play an important role in heat transport through an interface. In this study, TiN/Ti with different Ti thickness and Ti/TiN was coated on a copper substrate. In general all samples show increase in overall thermal conductivity as pressure was increased. The overall thermal conductivity of the material is measured at different contact pressures. It was observed that by switching the order of the coating, overall thermal conductivity changed drastically. It was also observed that thermal conductivity of the sample reduced when coating thickness was reduced.","PeriodicalId":110449,"journal":{"name":"2011 IEEE Symposium on Industrial Electronics and Applications","volume":"112 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-12-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Thermal measurements of two layered thin films of different orders on copper\",\"authors\":\"K. Dinash, D. Mutharasu, Y. Lee\",\"doi\":\"10.1109/ISIEA.2011.6108786\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Thermal interface resistance of solids is an important factor for heat conduction from one solid to another. Interface resistance disrupts heat flow in systems like CPUs and various solid state devices like LEDs. Interface materials play an important role in heat transport through an interface. In this study, TiN/Ti with different Ti thickness and Ti/TiN was coated on a copper substrate. In general all samples show increase in overall thermal conductivity as pressure was increased. The overall thermal conductivity of the material is measured at different contact pressures. It was observed that by switching the order of the coating, overall thermal conductivity changed drastically. It was also observed that thermal conductivity of the sample reduced when coating thickness was reduced.\",\"PeriodicalId\":110449,\"journal\":{\"name\":\"2011 IEEE Symposium on Industrial Electronics and Applications\",\"volume\":\"112 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2011-12-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2011 IEEE Symposium on Industrial Electronics and Applications\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISIEA.2011.6108786\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 IEEE Symposium on Industrial Electronics and Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISIEA.2011.6108786","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

摘要

固体的热界面阻是影响固体间热传导的重要因素。界面电阻会破坏cpu等系统和led等各种固态器件的热流。界面材料在通过界面的热传递中起着重要作用。在本研究中,在铜衬底上涂覆不同厚度的TiN/Ti和Ti/TiN。总的来说,随着压力的增加,所有样品的总热导率都有所增加。在不同的接触压力下测量材料的总体导热性。观察到,通过改变涂层的顺序,总体导热系数发生了巨大变化。随着涂层厚度的减小,样品的导热系数降低。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Thermal measurements of two layered thin films of different orders on copper
Thermal interface resistance of solids is an important factor for heat conduction from one solid to another. Interface resistance disrupts heat flow in systems like CPUs and various solid state devices like LEDs. Interface materials play an important role in heat transport through an interface. In this study, TiN/Ti with different Ti thickness and Ti/TiN was coated on a copper substrate. In general all samples show increase in overall thermal conductivity as pressure was increased. The overall thermal conductivity of the material is measured at different contact pressures. It was observed that by switching the order of the coating, overall thermal conductivity changed drastically. It was also observed that thermal conductivity of the sample reduced when coating thickness was reduced.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信