化学刻蚀法生长硅纳米线的表征

R. Mertens, K. Sundaram
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引用次数: 2

摘要

采用硝酸银(AgNO3)/氢氟酸(HF)溶液化学刻蚀技术制备了硅纳米线(SiNWs)。使用各种方法、浓度和技术创建了200多个样本,产生了一些一致的结果,并揭示了一些随机特性。许多样品的扫描电镜图像显示了不同的生长阶段和用于生长SiNWs的各种技术的结果。这些图像和实验表明,以前关于sinw生长的观念可能被误解了。实验和拍摄的图像表明,SiNWs的生长过程是高度随机的,从蚀刻开始没有SiNWs开始,到SiNWs从由波纹状带状化硅(Si)组成的集中集聚区分支出来结束。提供了过程和SEM阶段图像,包括枝晶毯。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Characterization of silicon nanowires grown by electroless etching
Silicon nanowires (SiNWs) were created using the electroless etching technique using silver nitrate (AgNO3)/hydrofluoric acid (HF) solution. More than 200 samples were created using various methods, concentrations and techniques, producing some consistent results and revealing some random properties. SEM images were taken of many samples, showing various stages of growth and the results of the various techniques used to grow the SiNWs. These images and experiments show that previous notions on the growth of SiNWs may be misunderstood. The experiments performed and the images taken show that SiNWs growth process is highly randomized, starting at the beginning of the etch with no SiNWs, and ending with SiNWs branching away from a centralized agglomeration made up of corrugated, ribbonized Silicon (Si). Process and SEM stage images are provided, including dendrite blankets.
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