MEMS谐振器的光学驱动和检测:行为建模和相位噪声仿真

2012 IEEE International Frequency Control Symposium Proceedings Pub Date : 2012-05-21 DOI:10.1109/FCS.2012.6243656

G. Papin, R. Lévy, A. Bosseboeuf, F. Fabbri, F. Parrain, M. Malak, T. Bourouina, G. Lissorgues, P. Poulichet

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引用次数: 4

摘要

与标准检测技术(电容式、压电式)相比，MEMS谐振器的光学驱动和检测可以提高其运动检测的分辨率。本文提出了一种具有光学驱动和检测的MEMS谐振器的行为模型和相应的振荡电路，并用于确定其性能。

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Optical actuation and detection of MEMS resonators: Behavioral modeling and phase noise simulations

Optical actuation and detection of MEMS resonators can improve the resolution of their motion detection compared to standard detection techniques (capacitive, piezoelectric). In this paper, a behavioral model of MEMS resonator with optical actuation and detection and the associated oscillator circuit are presented and used to determine its performances.

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2012 IEEE International Frequency Control Symposium Proceedings

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