玻璃雕刻超表面:超低反射率、极宽带性能和高接收角的路径，适用于高功率激光应用

Laser Damage Pub Date : 2022-12-02 DOI:10.1117/12.2641631

N. Ray, J. Yoo, Hoang T. Nguyen, Michael A. Johnson, E. Feigenbaum

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引用次数: 0

摘要

最近利用金属蚀刻掩模制造基板雕刻超表面的工作受到可用蚀刻深度的限制，限制了抗反射性能的带宽。本文将讨论刻蚀掩模技术的进展，以促进更深的刻蚀，并介绍更高的超表面特征。这些高纵横比结构的抗反射性能(宽接收角和宽频带抗反射性能的两个偏振)将被讨论。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Glass-engraved metasurfaces: the path to ultra-low reflectance, extreme broadband performance, and high acceptance angle for high power laser applications

Recent work utilizing metal etching masks to fabricate substrate-engraved metasurfaces have been handicapped by the available etching depth, restricting the bandwidth of antireflective performance. Advances made to etch mask technology to facilitate deeper etching will be discussed here, and the taller ensuant metasurface features will be presented. The antireflective performance of these high aspect ratio structures (broad acceptance angles and broadband antireflective performance for both polarizations) will be discussed.

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Laser Damage

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