氮化镓异质外延的外来和普通衬底

E. Hellman
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引用次数: 1

摘要

人们通常认为,高质量氮化镓外延生长的主要障碍是缺乏晶格匹配的衬底。虽然这种观点过于简单化,但它传达了一个正确的印象,即最常用的基材蓝宝石有许多缺点。蓝宝石上有衬底可以改进吗?我们研究了氮化镓在多种材料上的生长,包括ZnO、LiGaO/sub 2/、LiAlO/sub 2/、ScMgAlO/sub 4/、Si、石榴石和尖晶石。通过在多种材料上生长,我们可以评估晶格匹配、热膨胀匹配、化学稳定性和相容性、极性,甚至衬底成本对随后生长的相对重要性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Exotic and mundane substrates for gallium nitride heteroepitaxy
It is often asserted that the principal obstacle to the epitaxial growth of high quality gallium nitride is the lack of a lattice matched substrate. Although this view is overly simplistic and underly factual, it conveys the correct impression that the most commonly used substrate, sapphire, has many shortcomings. Are there substrates to improve on sapphire? We have studied the growth of gallium nitride on a variety of materials, including ZnO, LiGaO/sub 2/, LiAlO/sub 2/, ScMgAlO/sub 4/, Si, garnets and spinels. By growing on a variety of materials, we can assess the relative importance of lattice match, thermal expansion match, chemical stability and compatibility, polarity, and even cost of a substrate on the ensuing growth.
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