分形电极结构气体传感器

Taicong Yang, Fengchun Tian, Anyan Jiang, Maogang Jiang
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引用次数: 0

摘要

随着社会的发展和应用需求的多样化,对气体传感器的性能提出了新的要求。传统的气体传感器研究主要集中在敏感材料上,包括新材料的开发和现有材料的复合。本文采用分形几何与传感器电极设计相结合的方法对气敏传感器的电极结构进行优化。分形几何的大比表面积和强电场特性进一步提高了气体传感器的性能。与传统的数字间电极传感器相比,具有更高的响应灵敏度。采用微机电系统技术结合微热板系统,有利于缩短传感器响应恢复时间,同时实现系统设计的小型化和集成化。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Gas Sensor with Fractal Geometry Optimized Electrode Structure
With the development of society and the diversification of application requirements, new demands are being placed on the performance of gas sensors. Traditional research on gas sensors has focused on sensitive materials, including the development of new materials and the compounding of existing materials. In this paper, we take an alternative approach to the optimization of the electrode structure of gas-sensitive sensors by combining fractal geometry with sensor electrode design. The performance of the gas sensor is further enhanced by the large specific surface area and strong electric field properties of the fractal geometry. Compared to conventional interdigital electrode sensors, they have higher response sensitivity. The use of Micro-Electro-Mechanical System technology combined with a micro hot plate system facilitates the reduction of sensor response recovery time and the miniaturization and integration of the system design simultaneously.
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