环形振荡器电路故障隔离与CMOS缺陷检测技术研究

2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) Pub Date : 2019-05-01 DOI:10.1109/ASMC.2019.8791793

V. Chan, M. Bergendahl, J. Strane, B. Austin, C. Boye, S. Mattam, S. Choi, A. Gaul, K. Cheng, A. Greene, D. Lea, T. Levin, G. Karve, S. Teehan, D. Guo

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引用次数: 2

摘要

环形振荡器(ROs)在CMOS技术一代的研究阶段用于良率学习。基于电气数据和分类方法，改进了故障检测和分类方法，形成了产量减损法帕累托。在线缺陷监测可以帮助估计RO成品率，在CMOS技术研究中是必不可少的。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Failure Isolation in Ring Oscillator Circuit and Defect Detection in CMOS Technology Research

Ring oscillators (ROs) are used for yield learning during the research phase of a CMOS technology generation. Based on electrical data and binning methods, we improve detection and classification fault methodologies and form a yield detractor pareto. Inline defect monitoring can help to estimate RO yield and is essential in CMOS technology research.

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来源期刊

2019 30th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

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