由MOVPE生长的HgCdTe制成的双频MW/LW irfpa

J. Price, C. L. Jones, L. Hipwood, C. Shaw, P. Abbot, C. Maxey, H. W. Lau, J. Fitzmaurice, R. Catchpole, M. Ordish, P. Thorne, H. Weller, R. Mistry, K. Hoade, A. Bradford, D. Owton, P. Knowles
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引用次数: 17

摘要

本文介绍了利用金属有机气相外延(MOVPE)生长的碲化镉(MCT)制成的双波段MW/LW红外探测器的设计、制造和性能。探测器是凝视的,焦平面阵列由HgCdTe台面二极管阵列组成,与硅读出电路碰撞。每个平台都有一个连接到ROIC,并且通过改变应用偏压来选择频带。在30 μm间距上的320x256像素阵列表现非常好。例如,在MW(中波)波段和LW(长波)波段的截止波长分别为5 μm和10 μm的阵列,在MW和LW波段的中位netd分别为10和17 mK,缺陷水平分别为0.3%和0.05%。有趣的是,LW缺陷水平通常低于MW缺陷水平,并且缺陷不相关;也就是说,在毫微米波段有缺陷的像素通常在低毫微米波段没有缺陷。已开发出24 μm间距上的640x512像素阵列。它们使用读出集成电路(ROIC),每个像素有两个电容,并且能够在帧期间切换频带,提供准同步图像。这些阵列的性能优异,在MW波段netd为14mK,在LW波段netd为23mK。设计了双带通滤波器并将其内置到检测器中。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Dual-Band MW/LW IRFPAs made from HgCdTe grown by MOVPE
This paper describes the design, fabrication and performance of dual-band MW/LW infrared detectors made from HgCdTe (MCT) grown by Metal Organic Vapour Phase Epitaxy (MOVPE). The detectors are staring, focal plane arrays consisting of HgCdTe mesa-diode arrays bump bonded to silicon read-out circuits. Each mesa has one connection to the ROIC and the bands are selected by varying the applied bias. Arrays of 320x256 pixels on a 30 μm pitch have performed exceedingly well. For example, arrays with a cut-off wavelength of 5 μm in the MW (mid-wave) band and 10 μm in the LW (long-wave) band have median NETDs of 10 and 17 mK and defect levels of 0.3% and 0.05%, in the MW and LW bands respectively. Interestingly the LW defect level is often lower than the MW defect level and the defects are not correlated; i.e. a pixel that is defective in the MW band is usually not defective in the LW band. Arrays of 640x512 pixels on a 24 μm pitch have been developed. These use a read-out integrated circuit (ROIC) that has two capacitors per pixel and the ability to switch bands during a frame giving quasi-simultaneous images. The performance of these arrays has been excellent with NETDs of 14mK in the MW band and 23mK in the LW band. Dual band-pass filters have been designed and built into a detector.
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