{"title":"溅射和电子束真空沉积制备低折射率光学薄膜的光学特性","authors":"Mai Hayamizu, Y. Tsuno, H. Murotani, S. Matsumoto","doi":"10.1364/OIC.2019.THD.4","DOIUrl":null,"url":null,"abstract":"Low-refractive-index Al2O3 optical thin films were prepared by simultaneous sputtering and electron-beam evaporation methods. This optical thin film also has practical mechanical properties and can withstand ultrasonic cleaning.","PeriodicalId":119323,"journal":{"name":"Optical Interference Coatings Conference (OIC) 2019","volume":"56 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Optical Characteristics of Low-Refractive-Index Optical Thin Films Fabricated by Sputtering and Electron-Beam Vacuum Deposition\",\"authors\":\"Mai Hayamizu, Y. Tsuno, H. Murotani, S. Matsumoto\",\"doi\":\"10.1364/OIC.2019.THD.4\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Low-refractive-index Al2O3 optical thin films were prepared by simultaneous sputtering and electron-beam evaporation methods. This optical thin film also has practical mechanical properties and can withstand ultrasonic cleaning.\",\"PeriodicalId\":119323,\"journal\":{\"name\":\"Optical Interference Coatings Conference (OIC) 2019\",\"volume\":\"56 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-06-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optical Interference Coatings Conference (OIC) 2019\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/OIC.2019.THD.4\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Interference Coatings Conference (OIC) 2019","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/OIC.2019.THD.4","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Optical Characteristics of Low-Refractive-Index Optical Thin Films Fabricated by Sputtering and Electron-Beam Vacuum Deposition
Low-refractive-index Al2O3 optical thin films were prepared by simultaneous sputtering and electron-beam evaporation methods. This optical thin film also has practical mechanical properties and can withstand ultrasonic cleaning.
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