基于弹簧的横轴传感MEMS电容式加速度计的仿真与分析

2020 7th International Conference on Control, Decision and Information Technologies (CoDIT) Pub Date : 2020-06-29 DOI:10.1109/CoDIT49905.2020.9263904

S. Sonkar, Prashant Kumar, Deepu Philip, A. Ghosh

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引用次数: 2

摘要

本文介绍了基于弹簧支撑的单轴MEMS电容式加速度计的研制。该加速度计基于横轴电容传感，研究了弹簧折叠次数增加对结构谐振频率、证明质量位移和电容变化的影响。利用COMSOL (version 5.1)多物理场软件，对MEMS电容式加速度计的动态特性进行了近似设计，并在有限元域进行了仿真。基本上，位移、加速度和加速度产生力的检测是通过一个极其微小的带有梳状结构的微米装置来完成的。

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Simulation and Analysis of Spring Based Transverse Axis Sensing MEMS Capacitive Accelerometer

This paper presents the development of spring supported based single-axis MEMS capacitive accelerometer. The accelerometer is based on the transverse axis capacitance sensing, and the study has been carried out to determine the effects on the structure resonance frequency, proof mass displacements, and change is capacitance if the number of spring fold increases. COMSOL (version 5.1) multiphysics software, the MEMS capacitive accelerometer is designed to approximate its dynamic characteristics and is simulated in the finite element domain. Basically, the detection of displacement, acceleration, and acceleration producing force is done by the help of an extremely tinny micro meter device attached with comb structures.

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2020 7th International Conference on Control, Decision and Information Technologies (CoDIT)

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