J. Stéen, R. Kerkhofs, V. Blech, J. Brugger, B. Kim
{"title":"适用于生物SPM实验的新型全铂纳米探针","authors":"J. Stéen, R. Kerkhofs, V. Blech, J. Brugger, B. Kim","doi":"10.1109/MMB.2006.251552","DOIUrl":null,"url":null,"abstract":"We have developed a hybrid scanning probe microscopy sensor consisting of a SU-8 body and full platinum cantilever and tip. The fabrication process is based on surface-micromachining of a silicon wafer, where oxidation sharpened moulds define the tip shape, giving tips with a radius sharper than 20 nm. With optimized sputter deposition parameters we obtained fully straight platinum cantilevers after release. The release is based on a dry isotropic silicon under-etching. Platinum shows biocompatibility, making the sensors suitable for imaging and force spectroscopy of living cells. A resonance frequency of 252 KHz and a mechanical quality factor of 56 are measured in air for a cantilever of 35 mumtimes20 mumtimes0.5 mum. A method for the immobilization of cells in cell-containers is developed to simplify their localization and imaging","PeriodicalId":170356,"journal":{"name":"2006 International Conference on Microtechnologies in Medicine and Biology","volume":"2 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-05-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Novel full platinum nanoprobes suitable for biological SPM experiments\",\"authors\":\"J. Stéen, R. Kerkhofs, V. Blech, J. Brugger, B. Kim\",\"doi\":\"10.1109/MMB.2006.251552\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We have developed a hybrid scanning probe microscopy sensor consisting of a SU-8 body and full platinum cantilever and tip. The fabrication process is based on surface-micromachining of a silicon wafer, where oxidation sharpened moulds define the tip shape, giving tips with a radius sharper than 20 nm. With optimized sputter deposition parameters we obtained fully straight platinum cantilevers after release. The release is based on a dry isotropic silicon under-etching. Platinum shows biocompatibility, making the sensors suitable for imaging and force spectroscopy of living cells. A resonance frequency of 252 KHz and a mechanical quality factor of 56 are measured in air for a cantilever of 35 mumtimes20 mumtimes0.5 mum. A method for the immobilization of cells in cell-containers is developed to simplify their localization and imaging\",\"PeriodicalId\":170356,\"journal\":{\"name\":\"2006 International Conference on Microtechnologies in Medicine and Biology\",\"volume\":\"2 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-05-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2006 International Conference on Microtechnologies in Medicine and Biology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MMB.2006.251552\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 International Conference on Microtechnologies in Medicine and Biology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MMB.2006.251552","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Novel full platinum nanoprobes suitable for biological SPM experiments
We have developed a hybrid scanning probe microscopy sensor consisting of a SU-8 body and full platinum cantilever and tip. The fabrication process is based on surface-micromachining of a silicon wafer, where oxidation sharpened moulds define the tip shape, giving tips with a radius sharper than 20 nm. With optimized sputter deposition parameters we obtained fully straight platinum cantilevers after release. The release is based on a dry isotropic silicon under-etching. Platinum shows biocompatibility, making the sensors suitable for imaging and force spectroscopy of living cells. A resonance frequency of 252 KHz and a mechanical quality factor of 56 are measured in air for a cantilever of 35 mumtimes20 mumtimes0.5 mum. A method for the immobilization of cells in cell-containers is developed to simplify their localization and imaging
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