{"title":"焊料凸点下各种限球金属系统的热稳定性","authors":"K. Mizuishi, T. Mori","doi":"10.1109/ITHERM.1988.28679","DOIUrl":null,"url":null,"abstract":"Thermal stability is discussed of ball-limited-metal (BLM) layers formed under controlled-collapse solder (lead-5 wt.% tin) bumps for flip-chip interconnections. All BLM systems used here consist of a triple-layer deposit of Cr or Ti as an adhesive; Ni, Mo, Pd, or Pt as a barrier; and Au as a surface metal. Using test chips with these BLM systems, mechanical pull-strength values of solder-bump joints are obtained. These values are associated with thermal phenomena at the interface between the BLM and solder layers. The chips with Ti adhesive layers show generally superior solder-joint strength to those with Cr layers, independently of the barrier metal used. This is due to the presence of a joint fracture mode closely related to the kind of adhesive metal. Among the BLM systems examined, Ti/Ni/Au is found to provide the most reliable solder joints. This is successfully utilized as a BLM system for GaAs devices.<<ETX>>","PeriodicalId":226424,"journal":{"name":"InterSociety Conference on Thermal Phenomena in the Fabrication and Operation of Electronic Components. I-THERM '88","volume":"16 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1988-05-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"12","resultStr":"{\"title\":\"Thermal stability of various ball-limited-metal systems under solder bumps\",\"authors\":\"K. Mizuishi, T. Mori\",\"doi\":\"10.1109/ITHERM.1988.28679\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Thermal stability is discussed of ball-limited-metal (BLM) layers formed under controlled-collapse solder (lead-5 wt.% tin) bumps for flip-chip interconnections. All BLM systems used here consist of a triple-layer deposit of Cr or Ti as an adhesive; Ni, Mo, Pd, or Pt as a barrier; and Au as a surface metal. Using test chips with these BLM systems, mechanical pull-strength values of solder-bump joints are obtained. These values are associated with thermal phenomena at the interface between the BLM and solder layers. The chips with Ti adhesive layers show generally superior solder-joint strength to those with Cr layers, independently of the barrier metal used. This is due to the presence of a joint fracture mode closely related to the kind of adhesive metal. Among the BLM systems examined, Ti/Ni/Au is found to provide the most reliable solder joints. This is successfully utilized as a BLM system for GaAs devices.<<ETX>>\",\"PeriodicalId\":226424,\"journal\":{\"name\":\"InterSociety Conference on Thermal Phenomena in the Fabrication and Operation of Electronic Components. I-THERM '88\",\"volume\":\"16 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1988-05-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"12\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"InterSociety Conference on Thermal Phenomena in the Fabrication and Operation of Electronic Components. I-THERM '88\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ITHERM.1988.28679\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"InterSociety Conference on Thermal Phenomena in the Fabrication and Operation of Electronic Components. I-THERM '88","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ITHERM.1988.28679","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Thermal stability of various ball-limited-metal systems under solder bumps
Thermal stability is discussed of ball-limited-metal (BLM) layers formed under controlled-collapse solder (lead-5 wt.% tin) bumps for flip-chip interconnections. All BLM systems used here consist of a triple-layer deposit of Cr or Ti as an adhesive; Ni, Mo, Pd, or Pt as a barrier; and Au as a surface metal. Using test chips with these BLM systems, mechanical pull-strength values of solder-bump joints are obtained. These values are associated with thermal phenomena at the interface between the BLM and solder layers. The chips with Ti adhesive layers show generally superior solder-joint strength to those with Cr layers, independently of the barrier metal used. This is due to the presence of a joint fracture mode closely related to the kind of adhesive metal. Among the BLM systems examined, Ti/Ni/Au is found to provide the most reliable solder joints. This is successfully utilized as a BLM system for GaAs devices.<>
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