M. Perenzoni, D. Perenzoni, D. Stoppa, V. Mulloni, F. Solazzi, G. Resta, B. Margesin
{"title":"用于生物医学应用的太赫兹微传感器","authors":"M. Perenzoni, D. Perenzoni, D. Stoppa, V. Mulloni, F. Solazzi, G. Resta, B. Margesin","doi":"10.1109/IWBP.2011.5954813","DOIUrl":null,"url":null,"abstract":"A low-cost integrated microsensor for biomedical applications is proposed. It is composed by an antenna-coupled microbolometer as detector, which is coupled to a specifically designed integrated circuit for biasing and readout. The main features are fast response to radiation, device level reference sensor, and electronic time-correlation for pulsed sources. The detector and the integrated circuits have been fabricated in a custom MEMS technology and a standard CMOS technology, respectively. First electrical measurements show properly operating devices.","PeriodicalId":142421,"journal":{"name":"2011 International Workshop on Biophotonics","volume":"17 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2011-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Terahertz microsensor for biomedical applications\",\"authors\":\"M. Perenzoni, D. Perenzoni, D. Stoppa, V. Mulloni, F. Solazzi, G. Resta, B. Margesin\",\"doi\":\"10.1109/IWBP.2011.5954813\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A low-cost integrated microsensor for biomedical applications is proposed. It is composed by an antenna-coupled microbolometer as detector, which is coupled to a specifically designed integrated circuit for biasing and readout. The main features are fast response to radiation, device level reference sensor, and electronic time-correlation for pulsed sources. The detector and the integrated circuits have been fabricated in a custom MEMS technology and a standard CMOS technology, respectively. First electrical measurements show properly operating devices.\",\"PeriodicalId\":142421,\"journal\":{\"name\":\"2011 International Workshop on Biophotonics\",\"volume\":\"17 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2011-06-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2011 International Workshop on Biophotonics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IWBP.2011.5954813\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2011 International Workshop on Biophotonics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IWBP.2011.5954813","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A low-cost integrated microsensor for biomedical applications is proposed. It is composed by an antenna-coupled microbolometer as detector, which is coupled to a specifically designed integrated circuit for biasing and readout. The main features are fast response to radiation, device level reference sensor, and electronic time-correlation for pulsed sources. The detector and the integrated circuits have been fabricated in a custom MEMS technology and a standard CMOS technology, respectively. First electrical measurements show properly operating devices.
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