高阶非球面光学补偿系统研究

International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors Pub Date : 2015-11-06 DOI:10.1117/12.2199627

Donghui Shen, B. Xie, Liang Zong, Congyue Zhang, L. Yu

{"title":"高阶非球面光学补偿系统研究","authors":"Donghui Shen, B. Xie, Liang Zong, Congyue Zhang, L. Yu","doi":"10.1117/12.2199627","DOIUrl":null,"url":null,"abstract":"According to the characteristics of high order asphere[1] and relative aperture, in order to improve the detection accuracy, a new optical compensation system is designed in this paper. The compensation system introduces conic asphere as splitter surface, greatly reducing the difficulty of the assembly. The comparison between the test results and the data from the three-dimensional profiler of Taylor Hobson, shows that test results are reliable.","PeriodicalId":380113,"journal":{"name":"International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors","volume":"109 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-11-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"High order aspheric optical compensation system research\",\"authors\":\"Donghui Shen, B. Xie, Liang Zong, Congyue Zhang, L. Yu\",\"doi\":\"10.1117/12.2199627\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"According to the characteristics of high order asphere[1] and relative aperture, in order to improve the detection accuracy, a new optical compensation system is designed in this paper. The compensation system introduces conic asphere as splitter surface, greatly reducing the difficulty of the assembly. The comparison between the test results and the data from the three-dimensional profiler of Taylor Hobson, shows that test results are reliable.\",\"PeriodicalId\":380113,\"journal\":{\"name\":\"International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors\",\"volume\":\"109 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-11-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2199627\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2199627","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

根据高阶非球面[1]和相对孔径的特点，为了提高检测精度，本文设计了一种新的光学补偿系统。补偿系统采用圆锥非球面作为分路面，大大降低了装配难度。试验结果与Taylor Hobson三维剖面仪数据的比较表明，试验结果是可靠的。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

High order aspheric optical compensation system research

According to the characteristics of high order asphere[1] and relative aperture, in order to improve the detection accuracy, a new optical compensation system is designed in this paper. The compensation system introduces conic asphere as splitter surface, greatly reducing the difficulty of the assembly. The comparison between the test results and the data from the three-dimensional profiler of Taylor Hobson, shows that test results are reliable.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors

自引率

0.00%

发文量