z轴CMOS-MEMS加速度计的设计空间探索

2010 IEEE Electronics, Robotics and Automotive Mechanics Conference Pub Date : 2010-09-28 DOI:10.1109/CERMA.2010.88

A. Mendez, S. Camacho-Léon, S. Martínez-Chapa

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引用次数: 0

摘要

在参数化研究中，对CMOS-MEMS z轴加速度计的尺寸进行了变化，旨在探索该装置可以实现的弹簧刚度的设计空间。将仿真得到的弹簧刚度结果与解析得到的结果进行比较，以评价用解析公式得到的精度。

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Design Space Exploration of Z-Axis CMOS-MEMS Accelerometers

The dimensions of a CMOS-MEMS Z-axis accelerometer are varied in a parametric study that pursues to explore the design space of the spring stiffness that can be achieved by this device. The results of the spring stiffness obtained via simulation will be compared to the one obtained via analytical results, to evaluate the accuracy obtained by using the analytical formulas.

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2010 IEEE Electronics, Robotics and Automotive Mechanics Conference

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