{"title":"不同矩形扫描策略在HRSTEM成像中的评价","authors":"Abner Velazco Torrejón","doi":"10.22443/rms.emc2020.146","DOIUrl":null,"url":null,"abstract":"Scanning transmission electron microscopes (STEMs) equipped with spherical aberration correctors are well known for their ability to obtain images with atomic scale information. The conventional ‘raster’ method scans the probe over the sample line by line. HRSTEM (High resolution STEM) imaging is typically performed by scanning a focused electron probe over a sample at sub-Ångstrom resolution. At such high resolution images, distortions are commonly present because of drift of the sample/stage during raster scanning, predominantly affecting the so-called ‘slow scan direction’ [1].","PeriodicalId":311343,"journal":{"name":"Proceedings of the European Microscopy Congress 2020","volume":"43 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Evaluation of different rectangular scan strategies for HRSTEM imaging\",\"authors\":\"Abner Velazco Torrejón\",\"doi\":\"10.22443/rms.emc2020.146\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Scanning transmission electron microscopes (STEMs) equipped with spherical aberration correctors are well known for their ability to obtain images with atomic scale information. The conventional ‘raster’ method scans the probe over the sample line by line. HRSTEM (High resolution STEM) imaging is typically performed by scanning a focused electron probe over a sample at sub-Ångstrom resolution. At such high resolution images, distortions are commonly present because of drift of the sample/stage during raster scanning, predominantly affecting the so-called ‘slow scan direction’ [1].\",\"PeriodicalId\":311343,\"journal\":{\"name\":\"Proceedings of the European Microscopy Congress 2020\",\"volume\":\"43 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-03-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the European Microscopy Congress 2020\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.22443/rms.emc2020.146\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the European Microscopy Congress 2020","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.22443/rms.emc2020.146","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Evaluation of different rectangular scan strategies for HRSTEM imaging
Scanning transmission electron microscopes (STEMs) equipped with spherical aberration correctors are well known for their ability to obtain images with atomic scale information. The conventional ‘raster’ method scans the probe over the sample line by line. HRSTEM (High resolution STEM) imaging is typically performed by scanning a focused electron probe over a sample at sub-Ångstrom resolution. At such high resolution images, distortions are commonly present because of drift of the sample/stage during raster scanning, predominantly affecting the so-called ‘slow scan direction’ [1].
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