光阻层压AlN陶瓷的金锡焊料电镀

S. Akhlaghi, J. Broughton, D. Ivey
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引用次数: 0

摘要

金锡共晶焊料在光电子工业中得到了广泛的应用。除了优异的热性能外,这种焊料的突出特性还包括高热疲劳抗力。本研究采用电镀工艺在光刻胶层压基底上沉积Au-30Sn (at%)焊料,这是基于之前在无图案金属化基底上沉积这种合金的成功尝试。在电镀光刻胶图案化基板的过程中遇到了一些困难。通过降低金锡比来改变电镀液的化学性质,解决了上述问题。问题的出现是因为电镀溶液通过光刻胶的针孔渗透,从而增加了电镀的实际开口面积。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Gold-tin solder electroplating of photo-resist laminated AlN ceramics
The eutectic gold-tin solder has been widely used in the optoelectronics/electronics industry. The prominent characteristics of this solder include high thermal fatigue resistance in addition to excellent thermal properties. An electroplating process was used in this study to deposit Au-30Sn (at%) solder on photoresist laminated substrates, based on previous successful attempts at depositing this alloy on unpatterned, metallized substrates. Difficulties were encountered in the course of electroplating photoresist patterned substrates. The problems were resolved by changing the chemistry of the electroplating solution through decreasing the gold:tin ratio. The problems arose because of penetration of the electroplating solution through pinholes in the photoresist, thus increasing the actual opening area for electroplating.
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